2D Inspector

Automatic optical inspection of wafer front surfaces in 2D




  • VCP User Interface allows a fast setup creation for automation
  • Open and flexible SPA measurement script with modern creation technology
  • Professional map-networking with SPA


2D Inspector Basics

  • Microscope inspection 6" and 8" wafer
  • Fully Automatic inspection workflow
  • ID Reading (via ethernet I/F)
  • Map reading, updating, creating
  • Chip inspection 100% or in sample mode
  • Speed optimized motorized stage


2D Inspector Options

  • Networks (TSK VEGAnet, EG Sortnet, TEL PN300, SPAwn)
  • Upgrade for 12" wafers
  • Online/Offline manual review of defect images
  • Open architecture for future add-ons (e.g. inker)


Inspection Features

  • Pattern measurement on top surface
  • Critical Dimension (CD) measurement
  • Pattern offset measurement in stacks (MEMS)
  • Chip variation model
  • Miscellaneous other features (please contact us for more information)
  • Customer-specific project developments
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