(EL = Edge Loading; TL = Transmitted Light)


Automatic optical inspection of wafer surfaces and layers in 2D with IR technology




  • VCP User Interface allows a fast setup creation for automation
  • Open and flexible SPA measurement script with modern creation technology
  • Professional map-networking with SPA


EL2061TL Basics

  • Microscope inspection 6" and 8" wafer
  • Fully Automatic inspection
  • Microscope and camera with IR functionality
  • Engineering manual mode available
  • ID Reading (via ethernet I/F)
  • Map reading, updating, creating
  • Chip inspection 100% or in sample mode
  • Motorized stage chuck and robot arm with wafer edge holding


EL2061TL Options

  • Networks (TSK VEGAnet, EG Sortnet, TEL PN300, SPAwn)
  • Open architecture for fututre add-ons (e.g. inker)


Inspection Features

  • Pattern measurement on top surface
  • Pattern measurement within material
  • Pattern offset measurement between layers
  • Miscellaneous other features (please contact us for more information)
  • Customer-specific project developments
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