Semi-automatic microscope inspection of 150-300mm bare wafers




  • VCP User Interface allows a fast setup creation for automation
  • Smart and modular wafer inspection workflow
  • Professional map-networking with SPA


BT12 Basics

  • Semi-automatic
  • Automatic loading 8" and 12" wafer
  • Manual wafer inspection with joystick
  • Manual wafer inspection with chip index stepping
  • Chip inspection 100% or in sample mode (AQL, LTPD)
  • illuminated top/back macro pre-inspection for wafer
  • ID Reading (via ethernet I/F)
  • Map reading, updating, creating


BT12 Options

  • Networks (TSK VEGAnet, EG Sortnet, TEL PN300, SPAwn)
  • Autofocus
  • Automatic alignment and referencing
  • Forced bin inspection with reclassification
  • Fail bin inking and inkdot inspection
  • Automatic robot arm changer (standard/thin wafer)
  • Open architecture for future add-ons