Semi-automatic microscope inspection of 150-300mm framed or bare wafers




  • VCP User Interface allows a fast setup creation for automation
  • Smart and modular wafer inspection workflow
  • Professional map-networking with SPA


BT12F Basics

  • Semi-automatic
  • Automatic loading 8" and 12" wafer/frames
  • Automatic robot arm changer (wafer/frame)
  • Manual wafer inspection with joystick
  • Manual wafer inspection with chip index stepping
  • Chip inspection 100% or in sample mode (AQL, LTPD)
  • Illuminated top/back macro pre-inspection for wafer
  • ID Reading (via ethernet I/F)


BT12F Options

  • Networks (TSK VEGAnet, EG Sortnet, TEL PN300, SPAwn)
  • Autofocus
  • Automatic alignment and referencing
  • Forced bin review inspection with reclassification
  • Fail bin inking and inkdot inspection
  • Open architecture for future add-ons
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