Semi-automatic microscope inspection of 150-300mm framed wafers on front and backside




  • VCP User Interface allows a fast setup creation for automation
  • Smart and modular wafer inspection workflow
  • Professional map-networking with SPA


BT12F-Light Basics

  • Manual loading of frames by hand
  • 8" and 12" frames
  • Manual wafer inspection with joystick
  • Manual wafer inspection with chip index stepping
  • Chip inspection 100% or in sample mode (AQL, LTPD)
  • ID Reading (via BC hand scanner)
  • Map reading, updating, creating
  • High ergonomic standards


BT12F-Light Options

  • Networks (TSK VEGAnet, EG Sortnet, TEL PC300m SPAwn)
  • Autofocus
  • Automatic alignment and referencing
  • Backside wafer inspection with map edit functionality
  • Forced bin review inspection with reclassification
  • Fail bin inking and inkdot inspection
  • Open architecture for future add-ons
 BT12F-L icon