Semi-automatic microscope inspection of 150-300mm framed wafers on front and backside




  • VCP User Interface allows a fast setup creation for automation
  • Smart and modular wafer inspection workflow
  • Professional map-networking with SPA


MI3061F Basics

  • Pragmatic hardware concept consisting of microscope, camera and xy motorized table
  • Manual loading of frames by hand
  • Simple frame chuck holder with mechanical frame fixation
  • 6" 8" and 12" frames
  • Manual wafer inspection with joystick
  • Manual wafer inspection with chip index stepping
  • Chip inspection 100% or in sample mode (AQL, LTPD)
  • ID Reading (via BC hand scanner)
  • Map reading, updating, creating


MI3061F Options

  • Networks (TSK VEGAnet, EG Sortnet, TEL PC300m SPAwn)
  • Autofocus
  • Enhanced frame chuck holders for 6" 8" and 12" with vacuum fixation
  • Automatic alignment and referencing
  • Backside wafer inspection with map edit functionality
  • Forced bin review inspection with reclassification
  • Fail bin inking and inkdot inspection
  • Open architecture for future add-ons


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