Product


SPA wafer network

Open host system for probefloor networking with:

  • Optimized machine/equipment communication
  • Flexible process control
  • Professional wafer map/data handling

 

Features

Host System for Semiconductor Industry

  • Normalized storage of wafermaps
  • Centralized management of device data
  • Centralized management of machine setups
  • Machine independent controlmaps
  • Collection of chipdata through WQL tester connectivity
  • Centralized and scheduled generation of summaries
  • Import and export of production data to other systems
  • Standalone lot tracking and control
  • Connectivity to CAM systems

Common Database

  • Waferprober
    • EG series
    • TEL (KLA) series
    • TSK series
  • Optical inspection
    • OLYMPUS
    • Syncotec
  • Ink stations
  • Die Bonder

STANDARDIZED data storage

  • Production data
    • Wafermaps
    • Controlmaps
  • Log data
  • UP/DOWN time data
  • Compatible with
    • TSK prober
    • EG prober
    • KLA/TEL prober
    • ESEC die bonder
    • OLYMPUS
    • Syncotec
  • Others

Open Database connectivity

  • Front end data - Defect maps
    • Mask files
    •  Feedback data
  • UP/DOWN time
    • Several SQL databases
  • CAM
    • Workstream

SPAwn Wafermap Displayer

  • Single Wafermap
  • Lot search
  • Print tools
  • Composite Wafermap
    • Wafer
    • Lot
    • Type
  • Difference Map
spawn1
 spawn2
 spawn3
 spawn5
spawn4
 spawn6